| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATtiny24 Automotive | 2 | 14/20 | 16 | 4 | no | 12 | 12 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | VQFN (Sawn) 20 | VQFN (Sawn) 20 SOIC 14 |
| ATtiny25 Automotive | 2 | 20-Aug | 16 | 4 | no | 6 | 6 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 2 | 5 | 0 | 6 | no | yes | VQFN (Sawn) 20 | VQFN (Sawn) 20 SOIC-EIAJ 8 |
| ATtiny261 Automotive | 2 | 20/32 | 16 | 4 | no | 16 | 16 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 SOIC 20 |
| ATmega48 Automotive | 4 | 32 | 16 | 12 | no | 23 | 24 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 0.5 | 256 | no | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 3 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 TQFP 32 |
| ATtiny44 Automotive | 4 | 14/20 | 16 | 6 | no | 12 | 12 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | VQFN (Sawn) 20 | VQFN (Sawn) 20 SOIC 14 |
| ATtiny45 Automotive | 4 | 20-Aug | 16 | 3 | no | 6 | 6 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 5 | 0 | 6 | no | yes | VQFN (Sawn) 20 | VQFN (Sawn) 20 SOIC-EIAJ 8 |
| ATtiny461 Automotive | 4 | 20/32 | 16 | 8 | no | 16 | 16 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 SOIC 20 |
| ATmega88 Automotive | 8 | 32 | 16 | 12 | no | 23 | 24 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 1 | 512 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 3 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 TQFP 32 |
| ATtiny84 Automotive | 8 | 20 | 16 | 6 | no | 12 | 12 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | VQFN (Sawn) 20 | VQFN (Sawn) 20 SOIC 14 |
| ATtiny85 Automotive | 8 | 20-Aug | 16 | 3 | no | 6 | 6 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 2 | 5 | 0 | 6 | no | yes | VQFN (Sawn) 20 | VQFN (Sawn) 20 SOIC-EIAJ 8 |
| ATtiny861 Automotive | 8 | 20/32 | 16 | 8 | no | 16 | 16 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 SOIC 20 |
| ATtiny87 Automotive | 8 | 20/32 | 16 | -- | no | 16 | 16 | 0 | 2 | 1 | 1 | 0 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 3 | 1 | 9 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 TSSOP 20 SOIC 20 |
| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATtiny88 Automotive | 8 | 32 | 16 | 12 | no | 28 | 28 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 64 | yes | 0 | no | no | yes | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 2 | 4 | 1 | 2 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 TQFP 32 |
| ATmega164P Automotive | 16 | 44 | 16 | 16 | no | 32 | 32 | 0 | 3 | 1 | 2 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 1 | 512 | yes | 0 | no | no | yes | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 3 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 44 | VQFN (Sawn) 44 TQFP 44 |
| ATmega168 Automotive | 16 | 32 | 16 | 16 | no | 23 | 24 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 1 | 512 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 3 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 TQFP 32 |
| ATmega169P Automotive | 16 | 64 | 16 | 16 | no | 54 | 17 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 100 | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 1 | 512 | yes | 0 | no | no | yes | -40 to 85 °C | 2.7 to 5.5 | no | no / no | no | 3 | 4 | 1 | 4 | no | yes | TQFP 64 | TQFP 64 |
| ATmega16M1 Automotive | 16 | 32 | 16 | 12 | no | 27 | 27 | 0 | 1 | 0 | 1 | 1 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 125 | 4 | no | 1 | 10 | yes | 1 | 512 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 14 | 1 | 10 | no | yes | TQFP 32 | TQFP 32 VQFN (Sawn) 32 |
| ATtiny167 Automotive | 16 | 20/32 | 16 | 8 | no | 16 | 16 | 0 | 2 | 1 | 1 | 0 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 3 | 1 | 9 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 TSSOP 20 SOIC 20 |
| AT90CAN32 Automotive | 32 | 64 | 16 | 16 | no | 53 | 8 | 0 | 1 | 1 | 2 | 1 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 2 | 1024 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 4 | 8 | 2 | 7 | no | yes | TQFP 64 | |
| ATmega324P Automotive | 32 | 44 | 16 | 16 | no | 32 | 32 | 0 | 3 | 1 | 2 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 2 | 1024 | yes | 0 | no | no | yes | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 3 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 44 | VQFN (Sawn) 44 TQFP 44 |
| ATmega328P Automotive | 32 | 32 | 16 | 16 | no | 23 | 24 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 2 | 1024 | yes | 0 | no | no | yes | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 3 | 6 | 1 | 6 | no | yes | MLF (VQFN) 32 | MLF (VQFN) 32 TQFP 32 |
| ATmega32C1 Automotive | 32 | 32 | 16 | 12 | no | 27 | 27 | 0 | 1 | 0 | 1 | 1 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 125 | 4 | no | 1 | 10 | yes | 2 | 1024 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | TQFP 32 | TQFP 32 VQFN (Sawn) 32 |
| ATmega32M1 Automotive | 32 | 32 | 16 | 12 | no | 27 | 27 | 0 | 1 | 0 | 1 | 1 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 125 | 4 | no | 1 | 10 | yes | 2 | 1024 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 14 | 1 | 10 | no | yes | TQFP 32 | TQFP 32 VQFN (Sawn) 32 |
| AT90CAN64 Automotive | 64 | 64 | 16 | 16 | no | 53 | 8 | 0 | 1 | 1 | 2 | 1 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 4 | 2048 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 4 | 8 | 2 | 7 | no | yes | TQFP 64 | |
| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATmega644P Automotive | 64 | 44 | 16 | 16 | no | 32 | 32 | 0 | 3 | 1 | 2 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 4 | 2048 | yes | 0 | no | no | yes | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 3 | 6 | 1 | 6 | no | yes | VQFN (Sawn) 32 | VQFN (Sawn) 32 TQFP 44 |
| ATmega64C1 Automotive | 64 | 32 | 16 | 12 | no | 27 | 27 | 0 | 1 | 0 | 1 | 1 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 125 | 4 | no | 1 | 10 | yes | 4 | 2048 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | TQFP 32 | TQFP 32 VQFN (Sawn) 32 |
| ATmega64M1 Automotive | 64 | 32 | 16 | 12 | no | 27 | 27 | 0 | 1 | 0 | 1 | 1 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 125 | 4 | no | 1 | 10 | yes | 4 | 2048 | yes | 0 | no | no | no | -40 to 150 °C | 2.7 to 5.5 | no | no / no | no | 2 | 14 | 1 | 10 | no | yes | TQFP 32 | TQFP 32 VQFN (Sawn) 32 |
| AT90CAN128 Automotive | 128 | 64 | 16 | 16 | no | 53 | 8 | 0 | 1 | 1 | 2 | 1 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | no | 4 | 4096 | yes | 0 | no | no | no | -40 to 125 °C | 2.7 to 5.5 | no | no / no | no | 4 | 8 | 2 | 7 | no | yes | TQFP 64 |