| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | Quadrature Decoder Channels | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATtiny4 | 0.5 | 6 | 12 | 1 | no | 4 | 4 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 0 | 0 | 0 | 1 | no | 0 | 0 | no | 0.03 | 0 | no | 0 | no | no | no | -40 to 125 °C | 1.8 to 5.5 | no | no / no | no | 1 | 2 | 1 | 2 | no | yes | SOT23 6 | SOT23 6 UDFN / USON 8 |
| ATtiny5 | 0.5 | 6 | 12 | 1 | no | 4 | 4 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 8 | 15 | 1 | no | 0 | 0 | no | 0.03 | 0 | no | 0 | no | no | no | -40 to 125 °C | 1.8 to 5.5 | no | no / no | no | 1 | 2 | 1 | 2 | no | yes | SOT23 6 | SOT23 6 UDFN / USON 8 |
| ATtiny10 | 1 | 6 | 12 | 1 | no | 4 | 4 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 8 | 15 | 1 | no | 0 | 0 | no | 0.03 | 0 | no | 0 | no | no | no | -40 to 125 °C | 1.8 to 5.5 | no | no / no | no | 1 | 2 | 1 | 2 | no | yes | SOT23 6 | SOT23 6 UDFN / USON 8 |
| ATtiny9 | 1 | 6 | 12 | 1 | no | 4 | 4 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 0 | 0 | 0 | 1 | no | 0 | 0 | no | 0.03 | 0 | no | 0 | no | no | no | -40 to 125 °C | 1.8 to 5.5 | no | no / no | no | 1 | 2 | 1 | 2 | no | yes | SOT23 6 | SOT23 6 UDFN / USON 8 |
| ATtiny13 | 1 | 8/10/2020 | 20 | -- | no | 6 | 6 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | no | 0.06 | 64 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 1 | 2 | 0 | 2 | no | yes | MLF (VDFN) 10 | MLF (VDFN) 10 MLF (WQFN) 20 SOIC (208mil) 8 SOIC (150mil) 8 PDIP 8 |
| ATtiny13A | 1 | 8/10/2020 | 20 | -- | no | 6 | 6 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | no | 0.06 | 64 | yes | 0 | no | no | yes | -40 to 125 °C | 1.8 to 5.5 | no | no / no | no | 1 | 2 | 0 | 2 | no | yes | MLF (VDFN) 10 | MLF (VDFN) 10 MLF (WQFN) 20 PDIP 8 SOIC (150mil) 8 SOIC (208mil) 8 |
| ATtiny2313 | 2 | 20 | 20 | 4 | no | 18 | 18 | 0 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 0 | 0 | 15 | 1 | no | 0 | 0 | no | 0.12 | 128 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | MLF (WQFN) 20 | MLF (WQFN) 20 PDIP 20 SOIC (300mil) 20 |
| ATtiny2313A | 2 | 20 | 20 | -- | no | 18 | 18 | 0 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 0 | 0 | 15 | 1 | no | 0 | 0 | no | 0.12 | 128 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | MLF (WQFN) 20 | MLF (WQFN) 20 PDIP 20 SOIC (300mil) 20 VQFN 20 |
| ATtiny25 | 2 | 20-Aug | 20 | 4 | no | 6 | 6 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | no | -40 to 105 °C | 1.8 to 5.5 | no | no / no | no | 2 | 5 | 0 | 6 | no | yes | MLF (WQFN) 20 | MLF (WQFN) 20 PDIP 8 SOIC (150mil) 8 SOIC (208mil) 8 |
| ATtiny20 | 2 | 14/15/20 | 12 | 5 | yes | 12 | 12 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 0 | no | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 3 | no | yes | TSSOP 14 | TSSOP 14 UFBGA 15 VQFN 20 SOIC (150mil) 14 |
| ATtiny24 | 2 | 14/20 | 20 | 4 | no | 12 | 12 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | PDIP 14 | PDIP 14 SOIC (150mil) 14 MLF (WQFN) 20 |
| ATtiny24A | 2 | 14/20 | 20 | 4 | no | 12 | 12 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | PDIP 14 | PDIP 14 SOIC (150mil) 14 UFBGA 15 MLF (WQFN) 20 VQFN 20 |
| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | Quadrature Decoder Channels | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATtiny26 | 2 | 20/32 | 16 | -- | no | 16 | 11 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | no | 0.12 | 128 | no | 0 | no | no | no | -40 to 85 °C | 2.7 to 5.5 | no | no / no | no | 2 | 3 | 0 | 4 | no | yes | PDIP 20 | PDIP 20 SOIC (300mil) 20 MLF (VQFN) 32 |
| ATtiny261 | 2 | 20/32 | 20 | 4 | no | 16 | 16 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | PDIP 20 | PDIP 20 SOIC (300mil) 20 MLF (VQFN) 32 |
| ATtiny261A | 2 | 20/32 | 20 | 4 | no | 16 | 16 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.12 | 128 | yes | 0 | no | no | yes | -40 to 105 °C | 1.8 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | PDIP 20 | PDIP 20 SOIC (300mil) 20 MLF (VQFN) 32 TSSOP 20 |
| ATtiny28L | 2 | 28/32 | 4 | -- | no | 11 | 10 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 0 | 0 | 0 | 1 | no | 0 | 0 | no | 0.03 | 0 | no | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 1 | 0 | 0 | 0 | no | yes | PDIP 28 TQFP 32 MLF (VQFN) 32 PDIP 28 | |
| ATtiny40 | 4 | 20 | 12 | 12 | yes | 18 | 18 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 0 | no | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 2 | no | yes | VQFN 20 | VQFN 20 TSSOP 20 SOIC (300mil) 20 |
| ATtiny4313 | 4 | 20 | 20 | -- | no | 18 | 18 | 0 | 0 | 2 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 0 | 0 | 15 | 1 | no | 0 | 0 | no | 0.25 | 256 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | MLF (WQFN) 20 | MLF (WQFN) 20 PDIP 20 SOIC (300mil) 20 VQFN 20 |
| ATtiny43U | 4 | 20 | 8 | 8 | no | 16 | 16 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 64 | yes | 0 | no | no | yes | -40 to 85 °C | 0.7 to 5.5 | no | no / no | no | 2 | 4 | 0 | 4 | no | yes | MLF (WQFN) 20 | MLF (WQFN) 20 SOIC (300mil) 20 |
| ATtiny48 | 4 | 32 | 12 | 12 | no | 28 | 28 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 64 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 2 | no | yes | MLF (VQFN) 28 | MLF (VQFN) 28 PDIP 28 TQFP 32 UFBGA 32 (6x6) MLF (VQFN) 32 |
| ATtiny45 | 4 | 20-Aug | 20 | 3 | no | 6 | 6 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 5 | 0 | 6 | no | yes | MLF (WQFN) 20 | MLF (WQFN) 20 PDIP 8 SOIC (208mil) 8 TSSOP 8 |
| ATtiny44 | 4 | 14/20 | 20 | 6 | no | 12 | 12 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | PDIP 14 | PDIP 14 SOIC (150mil) 14 MLF (WQFN) 20 |
| ATtiny44A | 4 | 14/20 | 20 | 6 | no | 12 | 12 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | PDIP 14 | PDIP 14 SOIC (150mil) 14 UFBGA 15 MLF (WQFN) 20 VQFN 20 |
| ATtiny461 | 4 | 20/32 | 20 | 8 | no | 16 | 16 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | PDIP 20 | PDIP 20 SOIC (300mil) 20 MLF (VQFN) 32 |
| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | Quadrature Decoder Channels | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATtiny461A | 4 | 20/32 | 20 | 8 | no | 16 | 16 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.25 | 256 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | PDIP 20 | PDIP 20 SOIC (300mil) 20 MLF (VQFN) 32 TSSOP 20 |
| ATtiny88 | 8 | 32 | 12 | 12 | no | 28 | 28 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 64 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 2 | no | yes | MLF (VQFN) 28 | MLF (VQFN) 28 PDIP 28 TQFP 32 UFBGA 32 (6x6) MLF (VQFN) 32 |
| ATtiny85 | 8 | 20-Aug | 20 | 3 | no | 6 | 6 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 4 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 5 | 0 | 6 | no | yes | MLF (WQFN) 20 | MLF (WQFN) 20 PDIP 8 SOIC (208mil) 8 |
| ATtiny84 | 8 | 14/20 | 20 | 6 | no | 12 | 12 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 8 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 4 | 1 | 4 | no | yes | PDIP 14 | PDIP 14 SOIC (150mil) 14 MLF (WQFN) 20 |
| ATtiny861 | 8 | 20/32 | 20 | 8 | no | 16 | 16 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | PDIP 20 | PDIP 20 SOIC (300mil) 20 MLF (VQFN) 32 |
| ATtiny861A | 8 | 20/32 | 20 | 8 | no | 16 | 16 | 0 | 0 | 1 | 1 | 0 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | yes | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 6 | 1 | 6 | no | yes | PDIP 20 | PDIP 20 SOIC (300mil) 20 MLF (VQFN) 32 TSSOP 20 |
| ATtiny87 | 8 | 20/32 | 16 | -- | no | 16 | 16 | 0 | 0 | 2 | 1 | 1 | 0 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 3 | 1 | 9 | no | yes | TSSOP 20 | TSSOP 20 VQFN (Sawn) 32 SOIC 20 |
| ATtiny167 | 16 | 20/32 | 16 | 8 | no | 16 | 16 | 0 | 0 | 2 | 1 | 1 | 0 | 1 | 0 | 0 | 0 | no | no | no | no | 11 | 10 | 15 | 1 | no | 0 | 0 | yes | 0.5 | 512 | yes | 0 | no | no | no | -40 to 85 °C | 1.8 to 5.5 | no | no / no | no | 2 | 3 | 1 | 9 | no | yes | TSSOP 20 | TSSOP 20 VQFN (Sawn) 32 SOIC 20 |