| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | Quadrature Decoder Channels | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATxmega16A4 | 16 | 44/49 | 32 | 16 | no | 34 | 34 | 0 | 0 | 7 | 2 | 5 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 2000 | 2 | no | 2 | 12 | yes | 3.3 | 1024 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 5 | 16 | 16 | 16 | yes | yes | VFBGA 49 | VFBGA 49 MLF (VQFN) 44 TQFP 44 |
| ATxmega16D4 | 16 | 44/49 | 32 | 16 | no | 34 | 34 | 0 | 0 | 4 | 2 | 2 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 200 | 2 | no | 0 | 0 | yes | 2 | 1024 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 4 | 14 | 14 | 14 | yes | yes | VFBGA 49 | VFBGA 49 MLF (VQFN) 44 TQFP 44 |
| ATxmega32A4 | 32 | 44/49 | 32 | 16 | no | 34 | 34 | 0 | 0 | 7 | 2 | 5 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 2000 | 2 | no | 2 | 12 | yes | 4 | 1024 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 5 | 16 | 16 | 16 | yes | yes | VFBGA 49 | VFBGA 49 MLF (VQFN) 44 TQFP 44 |
| ATxmega32D4 | 32 | 44/49 | 32 | 16 | no | 34 | 34 | 0 | 0 | 4 | 2 | 2 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 200 | 2 | no | 0 | 0 | yes | 4 | 1024 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 4 | 14 | 14 | 14 | yes | yes | VFBGA 49 | VFBGA 49 MLF (VQFN) 44 TQFP 44 |
| ATxmega64A1 | 64 | 100 | 32 | 16 | no | 78 | 78 | 0 | 0 | 12 | 4 | 8 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 4 | 12 | yes | 4 | 2048 | yes | 1 | sdram | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 8 | 24 | 24 | 24 | yes | yes | VFBGA 100 (10x10) | VFBGA 100 (10x10) TQFP 100 CBGA 100 |
| ATxmega64A3 | 64 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 10 | 2 | 7 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 2 | 12 | yes | 4 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 7 | 22 | 22 | 22 | yes | yes | MLF (VQFN) 64 | MLF (VQFN) 64 TQFP 64 |
| ATxmega64A4 | 64 | 44 | 32 | -- | no | 34 | 34 | 0 | 0 | 7 | 2 | 5 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 2000 | 2 | no | 2 | 12 | yes | 4 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 5 | 16 | 16 | 16 | yes | yes | MLF (VQFN) 44 | MLF (VQFN) 44 TQFP 44 |
| ATxmega64D3 | 64 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 5 | 2 | 3 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 200 | 2 | no | 0 | 0 | yes | 4 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 5 | 18 | 18 | 18 | yes | yes | TQFP 64 | TQFP 64 MLF (VQFN) 64 |
| ATxmega64D4 | 64 | 64 | 32 | -- | no | 34 | 34 | 0 | 0 | 4 | 2 | 2 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 200 | 2 | no | 0 | 0 | yes | 4 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 4 | 14 | 14 | 14 | yes | yes | MLF (VQFN) 44 | MLF (VQFN) 44 TQFP 44 |
| ATxmega128A1 | 128 | 100 | 32 | 16 | no | 78 | 78 | 0 | 0 | 12 | 4 | 8 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 4 | 12 | yes | 8 | 2048 | yes | 1 | sdram | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 8 | 24 | 24 | 24 | yes | yes | VFBGA 100 (10x10) | VFBGA 100 (10x10) TQFP 100 CBGA 100 |
| ATxmega128A3 | 128 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 10 | 2 | 7 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 2 | 12 | yes | 8 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 7 | 22 | 22 | 22 | yes | yes | MLF (VQFN) 64 | MLF (VQFN) 64 TQFP 64 |
| ATxmega128A4 | 128 | 44 | 32 | -- | no | 34 | 34 | 0 | 0 | 7 | 2 | 5 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 2000 | 2 | no | 2 | 12 | yes | 8 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 5 | 16 | 16 | 16 | yes | yes | MLF (VQFN) 44 | MLF (VQFN) 44 TQFP 44 |
| Flash (Kbytes) | Pin Count | Max. Operating Frequency | QTouch Channels | Hardware QTouch Acquisition | Max I/O Pins | Ext Interrupts | Quadrature Decoder Channels | USB Interface | SPI | TWI | UART | CAN | LIN | SSC | Ethernet | SD / eMMC | Segment LCD | Graphic LCD | Video Decoder | Camera Interface | ADC channels | ADC resolution | ADC speed | Analog Comparators | Resistive Touch Screen | DAC channels | DAC resolution | Temp. Sensor | SRAM (Kbytes) | EEPROM (Bytes) | Self Program Memory | External Bus Interface | DRAM Memory | NAND Interface | picoPower | Temp. Range | I/O Supply Class | FPU | MPU / MMU | Crypto Engine | Timers | Output Compare channels | Input Capture Channels | PWM Channels | 32kHz RTC | Calibrated RC Oscillator | Packages | Green Packages | |
| ATxmega128D3 | 128 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 5 | 2 | 3 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 200 | 2 | no | 0 | 0 | yes | 8 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 5 | 18 | 18 | 18 | yes | yes | TQFP 64 | TQFP 64 MLF (VQFN) 64 |
| ATxmega128D4 | 128 | 44 | 32 | -- | no | 34 | 34 | 0 | 0 | 4 | 2 | 2 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 12 | 12 | 200 | 2 | no | 0 | 0 | yes | 8 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 4 | 14 | 14 | 14 | yes | yes | VFBGA 49 | VFBGA 49 MLF (VQFN) 44 TQFP 44 |
| ATxmega192A1 | 192 | 100 | 32 | -- | no | 78 | 78 | 0 | 0 | 12 | 4 | 8 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 4 | 12 | yes | 16 | 2048 | yes | 1 | sdram | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 8 | 24 | 24 | 24 | yes | yes | TQFP 100 | TQFP 100 CBGA 100 |
| ATxmega192A3 | 192 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 10 | 2 | 7 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 2 | 12 | yes | 16 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 7 | 22 | 22 | 22 | yes | yes | MLF (VQFN) 64 | MLF (VQFN) 64 TQFP 64 |
| ATxmega192D3 | 192 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 5 | 2 | 3 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 200 | 2 | no | 0 | 0 | yes | 16 | 2048 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 5 | 18 | 18 | 18 | yes | yes | TQFP 64 | TQFP 64 MLF (VQFN) 64 |
| ATxmega256A1 | 256 | 100 | 32 | -- | no | 78 | 78 | 0 | 0 | 12 | 4 | 8 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 4 | 12 | yes | 16 | 4096 | yes | 1 | sdram | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 8 | 24 | 24 | 24 | yes | yes | TQFP 100 | TQFP 100 CBGA 100 |
| ATxmega256A3 | 256 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 10 | 2 | 7 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 2 | 12 | yes | 16 | 4096 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 7 | 22 | 22 | 22 | yes | yes | MLF (VQFN) 64 | MLF (VQFN) 64 TQFP 64 |
| ATxmega256A3B | 256 | 64 | 32 | 16 | no | 47 | 49 | 0 | 0 | 8 | 2 | 6 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 2 | 12 | yes | 16 | 4096 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 7 | 22 | 22 | 22 | yes | yes | MLF (VQFN) 64 | MLF (VQFN) 64 TQFP 64 |
| ATxmega256D3 | 256 | 64 | 32 | 16 | no | 50 | 50 | 0 | 0 | 5 | 2 | 3 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 200 | 2 | no | 0 | 0 | yes | 16 | 4096 | yes | 0 | no | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | no | 5 | 18 | 18 | 18 | yes | yes | TQFP 64 | TQFP 64 MLF (VQFN) 64 |
| ATxmega384A1 | 384 | 100 | 32 | -- | no | 78 | 78 | 0 | 0 | 12 | 4 | 8 | 0 | 0 | 0 | 0 | 0 | no | no | no | no | 16 | 12 | 2000 | 4 | no | 4 | 12 | yes | 32 | 4096 | yes | 1 | sdram | no | yes | -40 to 85 °C | 1.6 to 3.6 | no | no / no | AES/DES | 8 | 24 | 24 | 24 | yes | yes | TQFP 100 | TQFP 100 CBGA 100 |